Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.N.Davydovade kruif, R.R.de kruifFukugami, N.N.FukugamiKondo, S.S.KondoPhilipsen, VickyVickyPhilipsenVan Setten, E.E.Van SettenConnolly, B.B.ConnollyLammers, A.A.LammersVaenkatesan, V.V.VaenkatesanZimmerman, J.J.ZimmermanHarned, N.N.Harned2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20525Impact of an etched EUV mask black border on imaging and overlayProceedings paper