Serra, N.N.SerraConzatti, F.F.ConzattiEsseni, D.D.EsseniDe Michielis, M.M.De MichielisPalestri, P.P.PalestriSelmi, L.L.SelmiThomas, S.S.ThomasWhall, T. E.T. E.WhallParker, E. H. C.E. H. C.ParkerLeadley, D. R.D. R.LeadleyWitters, LiesbethLiesbethWittersHikavyy, AndriyAndriyHikavyyHytch, M. J.M. J.HytchHoudellier, F.F.HoudellierSnoeck, E.E.SnoeckWang, T. J.T. J.WangLee, W. C.W. C.LeeVellianitis, GeorgiosGeorgiosVellianitisVan Dal, MarkMarkVan DalDuriez, BlandineBlandineDuriezDoornbos, GerbenGerbenDoornbosLander, RobRobLander2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16202Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETsProceedings paper