Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing

Möller, T.T.MöllerObermeier, G.G.ObermeierBearda, TwanTwanBeardaHuber, A.A.HuberSchmolke, R.R.Schmolkevon Ammon, W.W.von AmmonLerch, W.W.Lerch2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5500Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processingProceedings paper