Si-cap-free low-Dit SiGe gate stack for high-performance pFETs

Arimura, HiroakiHiroakiArimuraWostyn, KurtKurtWostynRagnarsson, Lars-AkeLars-AkeRagnarssonConard, ThierryThierryConardVaisman Chasin, AdrianAdrianVaisman ChasinFranco, JacopoJacopoFrancoMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchi2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34641Si-cap-free low-Dit SiGe gate stack for high-performance pFETsProceedings paperhttps://iopscience.iop.org/article/10.1149/09805.0377ecst