Gielis, SvenSvenGielisIvanov, MaksimMaksimIvanovPeys, NickNickPeysVan den Ham, JonathanJonathanVan den HamPavlovic, NikolinaNikolinaPavlovicBarrys, JurasJurasBarrysHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-242021-10-2420170955-2219https://imec-publications.be/handle/20.500.12860/28397Aqueous chemical solution deposition of ultra high-k LuFeO3 thin filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0955221916304782