Florent, KarineKarineFlorentPopovici, Mihaela IoanaMihaela IoanaPopoviciLavizzari, SimoneSimoneLavizzariDi Piazza, LucaLucaDi PiazzaGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26626Impact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2Meeting abstract