Faramarzi, VinaVinaFaramarzide Poortere, EtienneEtiennede PoortereVenugopalan, Syam ParayilSyam ParayilVenugopalanWoltgens, PieterPieterWoltgensWoo, YoungtagYoungtagWoovan de Kerkhof, MarkMarkvan de KerkhofKumar, PawanPawanKumarMedina Silva, HenryHenryMedina SilvaMorin, PierrePierreMorinAsselberghs, IngeIngeAsselberghsDorow, ChelseyChelseyDorowO'Brien, KevinKevinO'BrienMaxey, KirbyKirbyMaxeyAvci, UygarUygarAvci2024-08-192024-06-062024-08-192024978-1-5106-7218-50277-786XWOS:001222851800015https://imec-publications.be/handle/20.500.12860/43996Advanced EUV patterning of 2D TMDs for CMOS integrationProceedings paper10.1117/12.3011818978-1-5106-7219-2WOS:001222851800015