Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials

Safaverdi, SoghraSoghraSafaverdiBarkema, GerardGerardBarkemaKunnen, EddyEddyKunnenUrbanowicz, AdamAdamUrbanowiczMaes, ChristianChristianMaes2021-10-192021-10-1920111098-0121https://imec-publications.be/handle/20.500.12860/19718Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materialsJournal article