Dual monopole exposure strategy to improve extreme ultraviolet imaging

Franke, Joern-HolgerJoern-HolgerFrankeBrunner, Timothy A.Timothy A.BrunnerHendrickx, EricEricHendrickx2023-03-302022-10-292023-03-3020221932-5150WOS:000867486800002https://imec-publications.be/handle/20.500.12860/40631Dual monopole exposure strategy to improve extreme ultraviolet imagingJournal article10.1117/1.JMM.21.3.030501WOS:000867486800002