Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment

De Coster, WalterWalterDe CosterBrijs, BertBertBrijsOsiceanu, PetrePetreOsiceanuAlay, Josep LluisJosep LluisAlayCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/105Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardmentJournal article