On the frequency-dependent line admittance of VLSI interconnect lines on silicon-based semiconductor substrates

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7081On the frequency-dependent line admittance of VLSI interconnect lines on silicon-based semiconductor substratesJournal article