Polycrystalline silicon germanium as a structural material for surface micromachining

Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniDe Moor, PietPietDe MoorSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanBaert, KrisKrisBaertVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3815Polycrystalline silicon germanium as a structural material for surface micromachiningProceedings paper