Surface stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiN

Germain, MarianneMarianneGermainLeys, MaartenMaartenLeysDerluyn, JoffJoffDerluynBoeykens, StevenStevenBoeykensDegroote, StefanStefanDegrooteRuythooren, WouterWouterRuythoorenDas, JohanJohanDasVandersmissen, RafRafVandersmissenXiao, DongpingDongpingXiaoWang, WenfeiWenfeiWangBorghs, GustaafGustaafBorghs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10497Surface stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiNProceedings paper