Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI

Claes, GertGertClaesVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisVan Barel, GregGregVan BarelStoffels, SteveSteveStoffelsDecoutere, StefaanStefaanDecoutereNguyen, V.V.NguyenHentz, S.S.HentzRobert, P.P.RobertCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13529Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOIProceedings paper