Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

Alkoken, RanRanAlkokenBaram, MorMorBaramOron, GadiGadiOronSchuch, NiveaNiveaSchuchRobert, FredericFredericRobertFigueiro, ThiagoThiagoFigueiroBrand, OmriOmriBrandGeta, MatanMatanGetaSaha, KasturiKasturiSahaMiller, EliasEliasMillerZavhon, TalTalZavhonTiwari, DipayanDipayanTiwariSingh, DeepakkumarDeepakkumarSinghSarkar, Sujan KumarSujan KumarSarkarRincon Delgadillo, PaulinaPaulinaRincon DelgadilloLorusso, GianGianLorussoBeral, ChristopheChristopheBeralWei, Chih-IChih-IWeiCurvacho, GabrielGabrielCurvachoKim, Young ChangYoung ChangKimFenger, GermainGermainFenger2024-08-262024-06-152024-08-262024978-1-5106-7216-10277-786XWOS:001224296200031https://imec-publications.be/handle/20.500.12860/44048Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV EraProceedings paper10.1117/12.3010898978-1-5106-7217-8WOS:001224296200031