On the dependencies of the stochastic patterning-failure cliffs in EUVL

De Bisschop, PeterPeterDe BisschopHendrickx, EricEricHendrickx2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34960On the dependencies of the stochastic patterning-failure cliffs in EUVLProceedings paperhttps://doi.org/10.1117/12.2552179