Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks

Kaczer, BenBenKaczerVeloso, AnabelaAnabelaVelosoRoussel, PhilippePhilippeRousselGrasser, TiborTiborGrasserGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13936Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacksOral presentation