Claes, MartineMartineClaesRöhr, ErikaErikaRöhrConard, ThierryThierryConardDe Smedt, FrankFrankDe SmedtDe Gendt, StefanStefanDe GendtStorm, WolfgangWolfgangStormBauer, T.T.BauerMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5144Surface characterization after different wet chemical cleansProceedings paper