Gronheid, RoelRoelGronheidVaglio Pret, AlessandroAlessandroVaglio PretRathsack, BenjaminBenjaminRathsackHooge, JoshuaJoshuaHoogeScheer, StevenStevenScheerNafus, KathleenKathleenNafusShite, HideoHideoShiteKitano, JunichiJunichiKitano2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17196EUV reolution-LWR-sensitivity performance tradeoffs for a polymer bound PAG resistOral presentation