Vandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConardPetry, JasmineJasminePetryBrijs, BertBertBrijsBender, HugoHugoBenderRichard, OlivierOlivierRichardCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtGreen, MartinMartinGreenCartier, EduardEduardCartierCopel, M.M.Copel2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6984Characterization of high-k films grown by atomic layer depositionOral presentation