An in-plane SiGe differential capacitive accelerometer for above-IC integration

Wen, LianggongLianggongWenWouters, KristofKristofWoutersHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouwPuers, BobBobPuers2021-10-192021-10-192011-070960-1317https://imec-publications.be/handle/20.500.12860/20145An in-plane SiGe differential capacitive accelerometer for above-IC integrationJournal articlehttp://iopscience.iop.org/0960-1317/21/7/074011/pdf/0960-1317_21_7_074011.pdf