Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation

Dey, BappadityaBappadityaDeyCerbu, DorinDorinCerbuKhalil, KasemKasemKhalilHalder, SandipSandipHalderLeray, PhilippePhilippeLerayDas, SayantanSayantanDasSherazi, YasserYasserSheraziBayoumi, Magdy A.Magdy A.BayoumiKim, Ryan Ryoung hanRyan Ryoung hanKim2021-11-082021-11-022021-11-032021-11-052021-11-0820200277-786XWOS:000671888300037https://imec-publications.be/handle/20.500.12860/37726Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window EstimationProceedings paper10.1117/12.2552055978-1-5106-3424-4WOS:000671888300037