Electrical transport characterization of nano CMOS devices with ultra-thin silicon film

Ghibaudo, G.G.GhibaudoMouis, M.M.MouisPham-Nguyen, L.L.Pham-NguyenBennamane, K.K.BennamanePappas, I.I.PappasCros, A.A.CrosBidal, G.G.BidalFleury, D.D.FleuryClaverie, A.A.ClaverieBenassayag, G.G.BenassayagFazzini, P.-F.P.-F.FazziniFenouillet-Beranger, C.C.Fenouillet-BerangerMonfray, S.S.MonfrayBoeuf, F.F.BoeufCristoloveanu, S.S.CristoloveanuSkotnicki, T.T.SkotnickiCollaert, NadineNadineCollaert2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15344Electrical transport characterization of nano CMOS devices with ultra-thin silicon filmProceedings paper