Rochus, VeroniqueVeroniqueRochusRamezani, MalihehMalihehRamezaniCosemans, StefanStefanCosemansWitvrouw, AnnAnnWitvrouwDe Meyer, KristinKristinDe MeyerTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23004Design of SiGe nano-electromechanical relays for logic applicationsProceedings paper