Germain, MarianneMarianneGermainLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteCheng, KaiKaiChengBoeykens, StevenStevenBoeykensDerluyn, JoffJoffDerluynDas, JohanJohanDasRuythooren, WouterWouterRuythoorenVandersmissen, RafRafVandersmissenSchreurs, DominiqueDominiqueSchreursWang, WenfeiWenfeiWangXiao, DongpingDongpingXiaoBorghs, GustaafGustaafBorghs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10496ATHENA, Epi-GaN and beyond :MOVPE growth and processing of AlGaN/GaN HEMTOral presentation