Statistical characterization of off-state stress degradation in planar HKMG nFETs using device arrays

Saraza Canflanca, PabloPabloSaraza CanflancaSangani, DishantDishantSanganiDiaz Fortuny, JavierJavierDiaz FortunyTyaginov, StanislavStanislavTyaginovGielen, GeorgesGeorgesGielenBury, ErikErikBuryKaczer, BenBenKaczer2024-08-162024-08-162024979-8-3503-6977-91541-7026WOS:001229691100047https://imec-publications.be/handle/20.500.12860/44334Statistical characterization of off-state stress degradation in planar HKMG nFETs using device arraysProceedings paper10.1109/IRPS48228.2024.10529367979-8-3503-6976-2WOS:001229691100047