Self-assembled monolayers as model substrates for atomic layer deposition

Whelan, CarolineCarolineWhelanDemas, Anne-CécileAnne-CécileDemasSchuhmacher, JorgJorgSchuhmacherCarbonell, LaureLaureCarbonellMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9912Self-assembled monolayers as model substrates for atomic layer depositionProceedings paper