Xu, MengleiMengleiXuBearda, TwanTwanBeardaSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanFilipic, MihaMihaFilipicGordon, IvanIvanGordonDebucquoy, MaartenMaartenDebucquoySzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-242021-10-2420171862-6254https://imec-publications.be/handle/20.500.12860/29978Laser assisted patterning of a-Si:H: detailed investigation of laser damageJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201700125/abstract