Halder, SandipSandipHalderVos, RitaRitaVosWada, MasayukiMasayukiWadaClaes, MartineMartineClaesKenis, KarineKarineKenisMertens, PaulPaulMertensDighe, PrasannaPrasannaDigheRadovanovic, SandaSandaRadovanovicSimpson, GavinGavinSimpsonSonnemans, RogerRogerSonnemans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17207Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoringMeeting abstract