Fruehauf, JensJensFruehaufLindsay, RichardRichardLindsayBergmaier, AndreasAndreasBergmaierVandervorst, WilfriedWilfriedVandervorstTempel, GeorgGeorgTempelMaex, KarenKarenMaexDollinger, GüntherGüntherDollingerKoch, FrederickFrederickKoch2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6338Electrical activity of B and As segregated at the Si-SiO2 interfaceProceedings paper