Mannaert, GeertGeertMannaertWitters, LiesbethLiesbethWittersShamiryan, DenisDenisShamiryanBoullart, WernerWernerBoullartHan, KepingKepingHanLuo, ShiianShiianLuoFalepin, AnneliesAnneliesFalepinSonnemans, RogerRogerSonnemansBerry, IvanIvanBerryWaldfried, CarloCarloWaldfried2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14115Post extension ion implant photo resist strip for 32 nm technology and beyondOral presentationwww.ucpss.org