Richard, OlivierOlivierRichardVandooren, AnneAnneVandoorenKar, Gouri SankarGouri SankarKarVan Marcke, PatriciaPatriciaVan MarckeBender, HugoHugoBender2021-10-192021-10-192011-11https://imec-publications.be/handle/20.500.12860/19683Characterization of nanodevices by STEM tomographyProceedings paper