Tallarico, Andrea N.Andrea N.TallaricoCho, Moon JuMoon JuChoFranco, JacopoJacopoFrancoRitzenthaler, RomainRomainRitzenthalerTogo, MitsuhiroMitsuhiroTogoHoriguchi, NaotoNaotoHoriguchiGroeseneken, GuidoGuidoGroesenekenCrupi, FeliceFeliceCrupi2021-10-222021-10-2220141530-4388https://imec-publications.be/handle/20.500.12860/24590Impact of the substrate orientation on CHC reliability in n-FinFETs – separation of the various contributionsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6553082