Wang, ZiyangZiyangWangvan Andel, YvonneYvonnevan AndelJambunathan, MadhusudhananMadhusudhananJambunathanLeonov, VladimirVladimirLeonovElfrink, ReneReneElfrinkVullers, RuudRuudVullers2021-10-192021-10-192011-050361-5235https://imec-publications.be/handle/20.500.12860/20140Characterization of a bulk-micromachined membraneless in-plane thermopileJournal article