Junction depth and active dose extraction from photoelectrothermal modulated optical reflectance (PMOR) power curves

Dortu, FabianFabianDortuBogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12096Junction depth and active dose extraction from photoelectrothermal modulated optical reflectance (PMOR) power curvesProceedings paper