Reduction of gate-to-channel tunnelling current in FinFET structures

Rudenko, TamaraTamaraRudenkoKilchytska, ValeriaValeriaKilchytskaCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakNazarov, A.A.NazarovFlandre, DenisDenisFlandre2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12817Reduction of gate-to-channel tunnelling current in FinFET structuresJournal article