Mertens, PaulPaulMertensVermeire, BertBertVermeireDepas, MichelMichelDepasSchaekers, MarcMarcSchaekersHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/760Evaluation of different chlorine sources for gate oxidationProceedings paper