Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

Marinins, AleksandrsAleksandrsMarininsKjellman, JonJonKjellmanCaer, CharlesCharlesCaerKongnyuy, Tangla DavidTangla DavidKongnyuyRottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenSoussan, PhilippePhilippeSoussan2022-09-222022-09-092022-09-2220212160-9020WOS:000831479803276https://imec-publications.be/handle/20.500.12860/40402Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafersProceedings paper978-1-943580-91-0WOS:000831479803276