Kempsell Sears, MonicaMonicaKempsell SearsBekaert, JoostJoostBekaertSmith, Bruce W.Bruce W.Smith2021-10-212021-10-2120130003-6935https://imec-publications.be/handle/20.500.12860/22576Lens wavefront compensation for 3D photomask effects in subwavelength optical lithographyJournal articlehttp://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-52-3-314