Accurate extraction of fabricated geometry using optical meuasurement

Xing, YufeiYufeiXingDong, JiaxingJiaxingDongDwivedi, SarvagyaSarvagyaDwivediKhan, UmarUmarKhanBogaerts, WimWimBogaerts2021-10-262021-10-262018-102327-9125https://imec-publications.be/handle/20.500.12860/32300Accurate extraction of fabricated geometry using optical meuasurementJournal articlehttps://doi.org/10.1364/PRJ.6.001008