Layer configurations for Al-Ge eutectic wafer bonding

Visker, JakobJakobViskerKang, ShuoShuoKangPeng, LanLanPengVereecke, BartBartVereeckeHaspeslagh, LucLucHaspeslagh2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36276Layer configurations for Al-Ge eutectic wafer bondingProceedings paperhttps://iopscience.iop.org/article/10.1149/09804.0217ecst