van der Veen, MarleenMarleenvan der VeenHeylen, NancyNancyHeylenVarela Pedreira, OlallaOlallaVarela PedreiraCiofi, IvanIvanCiofiDecoster, StefanStefanDecosterVega Gonzalez, VictorVictorVega GonzalezJourdan, NicolasNicolasJourdanStruyf, HerbertHerbertStruyfCroes, KristofKristofCroesWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokei2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32042Damascene benchmark of Ru, Co and Cu in scaled dimensionsProceedings paperhttps://ieeexplore.ieee.org/document/8430407/