Gronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon DelgadilloSingh, ArjunArjunSinghYounkin, ToddToddYounkinSayan, SafakSafakSayanChan, BTBTChanVan Look, LieveLieveVan LookBekaert, JoostJoostBekaertPollentier, IvanIvanPollentierNealey, PaulPaulNealey2021-10-212021-10-2120130914-9244https://imec-publications.be/handle/20.500.12860/22434Readying directed self-assembly for patterning in semi-conductor manufacturingJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/26/6/26_779/_article