Lomonosov, AlexeyAlexeyLomonosovAyouch, AdilAdilAyouchRuello, PascalPascalRuelloVaudel, GwenaeleGwenaeleVaudelBaklanov, MikhaïlMikhaïlBaklanovVerdonck, PatrickPatrickVerdonckZhao, LarryLarryZhaoGusev, VitalyiVitalyiGusev2021-10-202021-10-2020121936-0851https://imec-publications.be/handle/20.500.12860/21052Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin filmsJournal article