Shamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivMilenin, AlexeyAlexeyMileninBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14461Plasma etching: from micro- to nanoscale device manufacturingProceedings paper