Miyaguchi, KenichiKenichiMiyaguchiBufler, FabianFabianBuflerChiarella, ThomasThomasChiarellaMatagne, PhilippePhilippeMatagneHoriguchi, NaotoNaotoHoriguchiDe Keersgieter, AnAnDe KeersgieterEneman, GeertGeertEnemanParvais, BertrandBertrandParvaisMocuta, AndaAndaMocutaSpessot, AlessioAlessioSpessotVerkest, DiederikDiederikVerkest2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28989Single and double diffusion breaks in 14nm FinFET and beyondProceedings paper