Calderon Gonzalez, MaiderMaiderCalderon GonzalezTietze, M. L.M. L.TietzeMondal, S.S.MondalGeorgitzikis, EpimitheasEpimitheasGeorgitzikisCheyns, DavidDavidCheynsAmeloot, R.R.AmelootGenoe, JanJanGenoe2026-03-192026-03-192025979-8-3315-3170-61071-9032https://imec-publications.be/handle/20.500.12860/58889Volatile organic compound sensors continue to face challenges in achieving key requirements for their practical use. In this context, metal-organic framework functionalized field-effect transistors hold great potential as game-changers in gas sensing, however, they are prone to baseline drift as many other gas sensing technologies. To address this issue, we integrated a microheater to facilitate degassing of residual gases. The thermal distribution of the microheater was evaluated by using temperature-sensing test structures. Additionally, the importance of the metal-organic framework as an enabler for methanol sensing was demonstrated. The influence of temperature pulses on the intrinsic characteristics of the a-IGZO channel was further addressed, showing a reversible de-trapping of electrons. By applying heating pulses of 100°C from the integrated microheater, the baseline drift caused by residual methanol was successfully corrected.engProceedings paper10.1109/icmts63811.2025.11068903WOS:001546500500031