Vega Gonzalez, VictorVictorVega GonzalezWilson, ChrisChrisWilsonPaolillo, SaraSaraPaolilloDecoster, StefanStefanDecosterMao, MingMingMaoVersluijs, JankoJankoVersluijsBlanco, VictorVictorBlancoKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLorant, ChristopheChristopheLorantVarela Pedreira, OlallaOlallaVarela PedreiraLesniewska, AlicjaAlicjaLesniewskaHeylen, NancyNancyHeylenEl-Mekki, ZaidZaidEl-Mekkivan der Veen, MarleenMarleenvan der VeenWebers, TomasTomasWebersVats, HemantHemantVatsRynders, LucLucRyndersCupak, MiroslavMiroslavCupakLee, Jae UkJae UkLeeDrissi, YoussefYoussefDrissiHalipre, LucLucHalipreCharley, Anne-LaureAnne-LaureCharleyVerdonck, PatrickPatrickVerdonckWitters, ThomasThomasWittersVan Gompel, SanderSanderVan GompelKimura, YosukeYosukeKimuraJourdan, NicolasNicolasJourdanCiofi, IvanIvanCiofiContino, AntoninoAntoninoContinoBoccardi, GuillaumeGuillaumeBoccardiLariviere, StephaneStephaneLariviereDe Wachter, BartBartDe WachterVancoille, EricEricVancoilleLazzarino, FredericFredericLazzarinoErcken, MoniqueMoniqueErckenKim, Ryan Ryoung hanRyan Ryoung hanKimTrivkovic, DarkoDarkoTrivkovicCroes, KristofKristofCroesLeray, PhilippePhilippeLerayPardons, KatrienKatrienPardonsBarla, KathyKathyBarlaTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/3433821 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallizationProceedings paperhttps://iitc-conference.org/2019-iitc-mam-program/