Characterization of electroplated copper films with laser-generated surface acoustic waves

Maznev, A.A.A.A.MaznevGostein, M.M.GosteinBrongersma, SywertSywertBrongersma2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7883Characterization of electroplated copper films with laser-generated surface acoustic wavesProceedings paper