Maslow, MarkMarkMaslowTimoshkov, VadimVadimTimoshkovKiers, TonTonKiersJee, Tae KwonTae KwonJeede Loijer, PeterPeterde LoijerMorikita, ShinyaShinyaMorikitaDemand, MarkMarkDemandMetz, Andrew WAndrew WMetzOkada, SoichiroSoichiroOkadaKumar, Kaushik A.Kaushik A.KumarBiesemans, SergeSergeBiesemansYaegashi, HidetamiHidetamiYaegashiDi Lorenzo, PaoloPaoloDi LorenzoBekaert, JoostJoostBekaertMao, MingMingMaoBeral, ChristopheChristopheBeralLariviere, StephaneStephaneLariviere2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28942Co-optimization of lithographic and patterning processes for improved EPE performanceProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2257979